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300/sec yaw rate gyro adxrs620 rev. b information furnished by analog devices is believed to be accurate and reliable. however, no responsibility is assumed by analog devices for its use, nor for any infringements of patents or other rights of third parties that may res ult from its use. specifications subject to change without notice. no license is granted by implication or otherwise under any patent or patent rights of analog devices. trademarks and registered trademarks are the property of their respective owners. o ne technology way, p.o. box 9106, norwood, ma 02062 - 9106, u.s.a. tel: 781.329.4700 www.analog.com fax: 781.461.3113 ? 2010 analog devices, inc. all rights reserved. f eatures qualified for automotive applications complete rate gyroscope on a single chip z- axis (yaw rate) response high vibration rejection over wide frequency 2000 g powered shock survivability ratiometric to referenced supply 5 v single - supply operation 105 c operation self - test on digital command ultrasmall and light (<0.15 cc, < 0.5 gram) temperature sensor output rohs c ompliant a pplications vehicle chassis rollover sensing inertial measurement units platform stabilization g eneral d escription t he adxrs 6 20 is a complete angular rate sensor (gyr oscope) that uses the analog devices, inc. , surface - micromachining process to create a functionally complete and low cost angular rate se nsor integrated with all required electronics on one chip. the manufacturing technique for this device is the same high vol ume bi mos process that is used for high reliability automotive airbag accelerometers. the adxrs620 is an automotive grade gyroscope that is 100% pin, package, temperature, and function compatible to the availab le industrial grade adxrs652 gyro. automotive grade gyroscopes have more extensive guaranteed minimum/maximum specifications due to automotive testing. the output signal, rateout (1b, 2a), is a voltage that is proportional to angular rate about the axis normal to t he top surface of the package. the output is ratiometric with respect to a provided reference supply. an external capacitor set s the bandwidth. other external capacitors are required for operation. a temperature output is pr o vided for compensatio n techniques. two digital self - test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal condi - tioning circuits. the ad x rs 620 is available in a 7 mm 7 mm 3 mm bga c eramic package. f unctional b lock di agram v dd agnd pgnd av cc st2 st1 temp v ratio cp1 cp2 cp3 cp4 cp5 sumj rateout demod 180k ? 1% 22nf 100nf 22n f 100nf 100nf 100nf drive amp mechanical sensor charge pump and voltage regulator c out +5v +5v +5v (adc ref) ac amp vga 25k? @ 25c adxrs620 25k? self-test 08887-001 figure 1.
adxrs620 rev. b | page 2 of 12 table of contents features .............................................................................................. 1 applications ....................................................................................... 1 general description ......................................................................... 1 functional block diagram .............................................................. 1 revision history ............................................................................... 2 specifications ..................................................................................... 3 absolute maximum ratings ............................................................ 4 rate sensitive axis ....................................................................... 4 esd caution .................................................................................. 4 pin configuration and function descriptions ............................. 5 typical performance characteristics ............................................. 6 theory of operation ........................................................................ 9 setting bandwidth .........................................................................9 temperature output and calib ration .........................................9 calibrated performance ................................................................9 adxrs620 and supply ratiometricity ................................... 10 null adjustment ......................................................................... 10 self- test function ...................................................................... 10 continuous self - te st .................................................................. 10 outline dimensions ....................................................................... 11 ordering guide .......................................................................... 11 automotive products ................................................................. 11 r evision h istory 9 /10 rev. a to rev. b changes to ordering guide .......................................................... 11 7/10 rev. 0 to rev. a changes to features section and general description section . 1 added note 2 to ordering guide ................................................. 11 added automotive products section ........................................... 11 3/10 revision 0: initial version
adxrs620 rev. b | page 3 of 12 specifications all minimum and maximum specifications are guaranteed. typical specifications are not guaranteed. t a = ? 40 c to +105 c, v s = av cc = v dd = 5 v, v ratio = av cc , angular r ate = 0 /s ec , b andwidth = 80 hz (c out = 0.01 f), i out = 100 a, 1 g , unless otherwise n oted. table 1. parameter conditions min typ max unit sensitivity 1 clockwise rotation is positive output measurement range 2 full - scale range over specifications range 300 /s ec initial and over t emperature ? 40c to +105c 5 .5 2 6 6.48 mv//s ec temperature drift 3 2 % nonlinearity best fit straight line 0.1 % of fs null 1 null ? 40c to +105c 2.2 2.5 2.8 v linear acceleration effect any axis 0.1 /sec / g noise performance r ate noise density t a 25 c 0.05 /s ec / hz frequency response bandwidth 4 0.01 2500 hz sensor resonant frequency 12 14.5 17 khz self - test 1 st1 rateout response st1 pin from logic 0 to logic 1 ? 650 ? 450 ? 250 mv st2 rateout response st2 pin from logic 0 to logic 1 250 450 650 mv st1 to st2 mismatch 5 ?5 +5 % logic 1 input voltage 3.3 v logic 0 input voltage 1.7 v input impedance to common 40 50 100 k? temperature sensor 1 v out at 25c load = 10 m? 2.35 2.5 2.65 v scale factor 6 @ 25c, v ratio = 5 v 9 mv/ c load to v s 25 k ? load to common 25 k ? turn - on time power on to ?/s ec of final 50 ms output drive capability current drive for rated specifications 200 a capacitive load drive 1000 pf power supply operating voltage (v s ) 4.75 5.00 5.25 v quiescent supply current 3.5 4.5 ma temperature range specified performance ? 40 +105 c 1 parameter is linearly ratio metric with v ratio . 2 the maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 v supplies. 3 from +25c to ?40c or from + 25c to 105c. 4 adjusted by external c apacitor , c out . reducing bandwidth below 0.01 hz does not reduce noise further . 5 self - test misma tch is described as (st2 + st1)/ ( (st2 ? st1)/ 2). 6 for a change in temperature from 25c to 26c. v temp is ratiometric to v ra tio . see the temperature output and calibration section for more details.
adxrs620 rev. b | page 4 of 12 absolute maximum rat ings table 2 . parameter rating acceleration (any axis, 0.5 ms) unpowered 2000 g powered 2000 g v dd , av cc ? 0.3 v to +6.0 v v ratio av cc st1, st2 av cc output short - circuit duration (any pin to common) indefinite operating temperature ra nge ? 55c to +125c storage temperature range ? 65c to +150c stresses above those listed under the absolute maximum ra t ings may cause permanent damage to the device. this is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational se c tion of this specification is not implied. exposure to absolute maximum rating conditions for extended periods may affect device reliability. drops onto hard surfaces can cause shocks of greater than 2000 g and can exceed the absolute maximum rating of the device. exercise care during handling to avoid damage. rate sensitive axis th e adxrs 620 is a z - axis rat e- sensing device (also called a yaw rate sensing device). it produces a positive going output v oltage for clockwise rotation about the axis normal to the package top, that is, clockwise when looking down at the package lid. rate axis longitudinal axis lateral axis + a b c d g 1 7 e f a1 rate out rate in 4.75v 0.25v v cc = 5v v ratio /2 gnd 08887-002 figure 2 . rateout signal increases with clockwise rotation esd caution
adxrs620 rev. b | page 5 of 12 pin configuration and function descript ions pgnd st1 st2 temp agnd v ratio nc sumj rateout av cc cp2 cp1 cp4 cp3 cp5 v dd g f e d c b a 7 6 5 4 3 2 1 08887-003 figure 3 . pin configuration table 3 . pin function descriptions pin no. mnemonic description 6d, 7d cp5 hv filter capacitor (0.1 f) 6a, 7b cp4 charge pump capacitor (22 nf) 6c, 7c cp3 charge pump capacitor (22 nf) 5a, 5b cp1 c harge pump capacitor (22 nf) 4a, 4b cp2 charge pump capacitor (22 nf) 3a, 3b av cc positive analog supply 1b, 2a rateout rate signal output 1c, 2c sumj output amp summing junction 1d, 2d nc no connect 1e, 2e v ratio reference supply for ratiometr ic output 1f, 2g agnd analog supply return 3f, 3g temp temperature voltage output 4f, 4g st2 self- test for sensor 2 5f, 5g st1 self- test for sensor 1 6g, 7f pgnd charge pump supply return 6e, 7e v dd positi ve charge pump supply
adxrs620 rev. b | page 6 of 12 typical performance characteristics n > 1000 for all typical performance plots, unless otherwise noted . 20 18 16 14 12 10 8 6 4 2 0 2.20 2.25 2.30 2.35 2.40 2.45 2.80 2.75 2.70 2.65 2.60 2.55 2.50 percentage of population (%) rate out (v) 08887-004 figure 4. null output at 25c ( v ratio = 5 v) 45 40 35 30 25 20 15 10 0 5 ?0.5 ?0.4 ?0.3 ?0.2 ?0.1 0 0.1 0.2 0.3 0.4 0.5 percentage of population (%) (/sec/c) 08887-005 figure 5. null drift o ver temperature ( v ratio = 5 v) 16 14 12 10 8 6 4 2 0 % of population sensitivity (mv//sec) 08887-006 5.5 5.6 5.7 5.8 5.9 6 6.1 6.56.46.36.2 figure 6. sensitivity at 25c (v ratio = 5 v) 30 25 20 15 10 5 0 ?10 ?8 ?6 ?4 ?2 0 2 4 6 8 10 percentage of population (%) drift (%) 08887-007 figure 7. sensitivity drift o ver t emperature 35 0 5 10 15 20 25 30 ?650 ?610 ?570 ?530 ?490 ?450 ?410 ?370 ?330 ?290 ?250 percentage of population (%) st1 (mv) 08887-008 figure 8. st1 output c hange at 25c (v ratio = 5 v) 40 35 30 25 20 15 10 5 0 percentage of population (%) st2 (mv) 08887-009 250 290 330 370 410 450 490 650610570530 figure 9. st2 output c hange at 25c (v ratio = 5 v)
adxrs620 rev. b | page 7 of 12 70 60 50 40 30 20 10 0 ?5 ?4 ?3 ?2 ?1 543210 percentage of population (%) self-test mismatch (%) 08887-010 figure 10 . s elf - test mismatch at 25c ( v ratio = 5 v) 600 400 200 0 ?600 ?400 ?200 ?40 ?20 0 20 40 80 100 120 60 self-test (mv) temperature (c) st1 st2 08887-011 figure 11 . typical self - test change o ver temperature 0 5 10 15 20 25 30 2.5 2.7 2.9 3.1 3.3 3.5 3.7 3.9 4.1 4.3 4.5 percentage o f po pul ation (%) current consumption (m a) 08887-012 figure 12 . current consumption at 25c (v ratio = 5 v) 40 35 30 25 0 5 10 15 20 2.40 2.42 2.44 2.46 2.48 2.50 2.54 2.56 2.58 2.60 2.52 percentage of population (%) voltage (v) 08887-015 figure 13 . v temp output at 25c (v ratio = 5 v) 3.3 3.1 2.9 2.7 1.5 2.1 1.9 1.7 2.3 2.5 ?40 ?20 0 20 40 60 100 120 80 voltage (v) temperature (c) 256 parts 08887-013 figure 14 . v temp output o ver temperature (v ratio = 5 v) 60 50 30 40 10 20 ?20 ?10 0 750 770 810 830 850 790 g or /sec time (ms) y ref x +45 ?45 08887-014 figure 15 . g and g g sensitivity for a 50 g , 10 ms pulse
adxrs620 rev. b | page 8 of 12 0 0. 2 0. 4 0. 6 0. 8 1.0 1. 2 1. 6 2.0 1. 4 1. 8 10 0 1k 10k peak rateout ( /s) frequency (hz) lat long ra te 08887-116 figure 16 . typical response to 10 g sinusoidal vibration (sensor bandwidth = 2 khz) 400 300 200 100 0 ?100 ?200 ?300 ?400 0 250 150 100 200 50 time (ms) rate of rotation (/ sec ) dut1 offset by +200/sec dut2 offset by ?200/sec 08887-016 figure 17 . typical high g (2500 g ) shock response (sensor bandwidth = 40 hz) 1 0.1 0.01 0.001 0.01 0.1 100k 10k 1k 100 10 1 average time (seconds) root allan deviation (/ sec rms) 08887-017 figure 18 . typical root allan deviation at 25c vs. averaging time 0.10 ?0.05 0 0.05 ?0.10 0 140 120 100 80 60 40 20 time (hours) rate of rotation (/ sec ) 08887-018 figure 19 . typical shift in 90 s ec null averages accumulated o ver 140 h ours 0.10 0.05 0 ?0.05 ?0.10 0 3600 1800 1200 3000 2400 600 time (seconds) rate of rotation (/ sec ) 08887-019 figure 20 . typical shift in short - term null (bandwidth = 1 hz) 0.1 0.001 0.01 0.0001 10 100k 1k 100 frequency (hz) noise spectral density(/ sec / hz rms) 10k 08887-020 figure 21 . typical noise spectral density (bandwidth = 40 hz)
adxrs620 rev. b | page 9 of 12 theory of operation the adxrs 620 operates on the principle of a resonator gyro. two polysilicon sensing structures each contain a dither fra me that is electrostatically driven to resonance , producing the necessary velocity element to produce a coriolis force during angular rate. at two of the outer extremes of each frame, or thogonal to the dither mo tion, are movable fingers that are placed between fixed pickoff fingers to form a capacitive pickoff structure that senses coriolis motion. the resulting signal is fed to a series of gain and demodulation stages that produce s the electrical rate signal out put. the dual - sensor design rejects external g - forces and vibration. fabricating the sensor with the signal conditioning electronics preserves signal integrity in noisy env i ronments. the electrostatic resonator requires 18 v to 20 v for operation. because only 5 v are typically av ailable in most applications, a charge pump is included on chip. if an external 18 v to 20 v supply is avail able, the two capacitors on cp1 through cp4 can be omi t ted and this supply can be connected to cp5 (pin 6d, pin 7d). note t hat cp5 should not be grounded when power is applied to the adxrs 620. although no damage occur s, under certain conditions the charge pump may fail to start up after the ground is removed without first removing power from the adxrs 620 . setting bandwidth ex ternal c apacitor c out is used in combination with the on - chip r out resistor to create a low - pass filter to limit the bandwidth of the adxrs 620 rate response. the ? 3 db fr e quency set by r out and c out is ( ) out out ut o cr f = 2 1 this frequency can be well con trolled because r out has been trimmed du r ing manufacturing to be 180 k ? 1%. any external resistor applied b e tween the rateout pin (1b, 2a) and sumj pin (1c, 2c) result s in ( ) ( ) ext ext ut o r r r + = k180 k180 in general, an additional hardware or software filter is a dded to attenuate high frequency noise arising from demodulation spikes at the gyros 14 khz resonant frequency . (t he noise spikes at 14 khz can be clearly seen in the power spectral density curve shown in figure 21 ). typically, t his additional filters corner fre quency is set to greater than 5 the required bandwidth t o preserve good phase response. figure 22 shows the effect of adding a 250 hz filter to the output of an adxrs 620 set to 40 hz bandwidt h (as shown in figure 21). high frequency demodulation artifacts are attenuated by approximately 18 db . 0.1 0.01 0.000001 0.00001 0.0001 0.001 10 100k 1k 100 frequency (hz) noise spectral density(/ sec / hz rms) 10k 08887-021 figure 22 . noise spectral density with additional 250 hz filter temperature output a nd calibrati on it is common practice to temperature - calibrate gyros to improve their overall accuracy. the adxrs 620 has a temper a ture propor - tional voltage output that provides input to such a cal i bration method. the temperature sensor structure is shown in figure 23 . the temperature o utput is characteristically non linear, and any load resistance connected to the temp output results in decreasing the temp output and temperature coef ficient. therefore, b uf - fering the output i s recommended. the voltage at the temp pin (3f, 3g) is nominally 2.5 v at 25c , and v ratio = 5 v. t h e temperature coefficient is ~9 mv/c at 25c. although the temp output is highly repeatable, it has only modest absolute accuracy. v ratio v temp r fixed r temp 08887-022 figure 23 . temperature sensor structure calibrated performan ce using a three - point calibration technique, it is possible to calibrate the null and sensitivity drift of the adxrs 620 to an overall accuracy of nearly 20 0/hour. an overall accuracy of 40/hour or better is possible using more points. limiting the bandwidth of the device reduces the flat - band noise during the calibration process, improving the measure - ment accuracy at each calibr a tion point.
adxrs620 rev. b | page 10 of 12 adxrs 620 and supply ratiometr icity the adxrs 620 rateout and te mp signals are ratiometric to the v ratio voltage, that is , the null voltage, rate sensitivity, and temperature outputs are proportional to v ratio . thus, the adxrs 620 is most easily used with a supply - ratiometric adc that results in self- cancellation of errors due to minor supply vari a tions. there is some small error due to non ratiometric behavior. typical ratiome t ricity error for null, sensitivity, self - test, and temperature output is o utlined in table 4 . note that v ratio must neve r be greater than av cc. table 4 . ratiometricity error for various parameters parameter v s = v ratio = 4.85 v v s = v ratio = 5.15 v st1 mean 0.3% 0.09% sigma 0.21% 0.19% st2 mean ?0.15% ?0.2% sigma 0.22% 0.2% null mean ?0 .3% ?0.05% sigma 0.2% 0.08% sensitivity mean 0.003% ?0.25% sigma 0.06% 0.06% v temp mean ?0.2% ?0.04% sigma 0.05% 0.06% null adjustment the nom i nal 2.5 v null is for a symmetrical swing range at rateout (1b, 2a). however, a nonsymmetrical outpu t swing may be sui t able in some applications. null adjustment is possible by injecting a suitable current to sumj (1c, 2c). note that supply distu r bances may reflect some null instability. digital supply noise should be avoided , partic u larly in this case. self - test function the adxrs 620 includes a self - test feature that actuates each of the sensing structures and associated electronics as if subjected to angular rate. it is activated by standard logic high levels applied to input st1 (5f, 5g), input st2 (4f , 4g), or both. st1 causes the voltage at rateout to change about ? 0.450 v, and st2 causes an opposite change of +0. 450 v. the self - test response follows the viscosity temperature depen d ence of the package atmosphere, approximately 0.25%/c. activating bot h st1 and st2 simultaneously is not damaging. st1 and st2 are fairly closely matched (5%), but actua t ing both s i multaneously may result in a small apparent null bias shift pro portional to the degree of self - test mismatch. st1 and st2 are activated by appl ying a voltage equal to v ratio to the st1 and st2 pins. the voltage applied to st1 and st2 must never be greater than av cc . continuous self - test t he on - chip integration of the adxrs 620 gives it higher rel i ability than is obtainable with any other high volu me manufa c turing method. in addition , it i s manufactured under a mature bi mos process with field - proven reliability. as an additional failure detection measure, a power - on self - test can be performed. ho w ever, some applicati ons may warrant continuous self -t est while sensing rate. details outlining continuous self - test techniques are also available in the an - 768 application note at analog.com .
adxrs620 rev. b | page 11 of 12 outline dimensions a b c d e f g 7 6 5 4 3 top view detail a ball diameter 0.60 0.55 0 .50 0.60 max 0.25 min coplanarity 0.15 2 1 * a1 corner index ar ea 3.20 max 2.50 min * ball a1 identifier is g old p lated and connected to the d/a pad internally via holes. 10-26-2009-b 7.05 6.85 sq 6.70 a1 ball corner bottom view detail a 0.80 bsc 4.80 bsc sq seating plane 3.80 max figure 24 . 32 - lead ceramic ball grid array [cbga] (bg- 32 -3) dimensions shown in millimeters ordering guide model 1 , 2 temperature range package description package o ption ADXRS620BBGZ C 40c to +105c 32- lead ceramic ball grid array (cbga) bg -32 -3 ADXRS620BBGZ -rl C 40c to +105c 32- lead ceramic ball grid array (cbga) bg -32 -3 adxrs 620 w bbg za C 40c to +105c 32- lead ceramic ball grid array (c bga ) bg -32 -3 adxrs 620 w bbg za- rl C 40c to +105c 32- lead ceramic ball grid array (cbga) bg -32 -3 eval - adxrs620z evaluation board 1 z = r ohs compliant part. 2 w = qualified for automotive applications. aut omotive products the adxrs620w models are available with controlled manufacturing to support the quality and reliability requirements of autom otive applications. note that these automotive models may have specifications that differ from the commercial mod els; therefore, designers should review the specifications section of this data sheet carefully. only the automotive grade products shown are available for use in automotive applications. contact your local analog devices account representative for specifi c product ordering information and to obtain the specific automotive reliability reports for these models.
adxrs620 rev. b | page 12 of 12 notes ? 2010 analog devices, inc. all rights reserved. trademarks and registered trademarks are the property of their respective owners. d08887 -0- 9/10(b)

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